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2 edition of Electron density measurements in an argon inductivelycoupledplasma found in the catalog.

Electron density measurements in an argon inductivelycoupledplasma

Electron density measurements in an argon inductivelycoupledplasma

by

Written in English

Edition Notes

 ID Numbers Statement C. Brown ; supervised by R. Snook. Contributions Snook, R., DIAS. Open Library OL21428052M

Electron temperature and ion density measurements in a glow discharge of an Ar–N2 mixture P.G. Reyes et al Radiation Effects and Defects in Solids 1. Crossref. Comparison of the characteristics of atmospheric pressure plasma jets using different working gases and applications to plasma-cancer cell interactions. In this work, the plasma electron density in argon discharge with inductively coupled plasma (ICP) source was in-situ measured by THz-TDS approach and combined with LTS method, which was acknowledged as a one of the most accurate method to measure the electron density.

The electron density barely increases when a sudden change in the gas composition occurs. The E to H mode transition occurs at a stationary gas composition as the absorbed power increases. The EEDFs of CO 2 plasma, CO plasma, and O 2 plasma were calculated using BOLSIG+, which is a two term Boltzmann solver [G. Hagelaar and L. Author: Kyung-Hyun Kim, Kwan-Yong Kim, Young-Hun Hong, Ho-Jun Moon, Chin-Wook Chung.   Lee and C. W. Chung, “ Experimental measurements of spatial plasma potentials and electron energy distributions in inductively coupled plasma under weakly collisional and nonlocal electron kinetic regimes,” Phys. Plas ().Cited by: 2.

High electron density inductively coupled plasma (ICP) systems are finding increasing applications in the areas of microelectronic processing, cleaning and illumination. In order to understand the fundamental plasma physics mechanisms and to provide data to benchmark codes, many experiments have focused on inductive discharges in argon Cited by: Spearochunica Ada Vol 44B, No 4, pp , /89 S+ 00 Printed 10 Great Bntain Pcrgampn Press pic On the influence of water on the electron density in an argon inductively coupled plasma S. NOWAK*, J. A. M. VAN DER MULLEN, A. C. A. P. VAN LAMMERE^ and D. C. SCHRAM Physics Department, Eindhoven University of Technology, Cited by:

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Electron density measurements in an argon inductivelycoupledplasma by Download PDF EPUB FB2

Electron temperature, electron density, and neutral atom density were measured in a radio‐frequency (rf) inductively coupled plasma using Thomson and Rayleigh scattering of laser radiation. Measurements were made in an argon discharge for pressures from 1 to 20 mTorr and input rf powers from to W.

Spatial distribution profiles were measured for discharges Cited by: Electron temperature, density and energy distribution functions (EEDF) in an argon, planar, radiofrequency inductively-coupled plasma (ICP) were measured using laser Thomson scattering.

In dc plasmas, the EEDF in higher pressure discharges was Maxwellian but in low pressure discharges, a non-Maxwellian distribution was observed. Request PDF | Electron density characterization of inductively-coupled argon plasmas by the terahertz time-domain spectroscopy | Inductively-coupled plasmas (ICP) in the high electron density.

The capability of the method is demonstrated on the basis of exemplary measurements in an inductively coupled plasma (ICP, MHz) suitable for PECVD. Line-integrated electron densities. In the last two decades, the fundamentals of electron- impact excitation processes influencing the populations of the lowest (3p 5 4s, 3p 5 4p, 3p 5 3d, 3p 5 5s, and 3p 5 5p) excited states in argon have been intensively studied, from the threshold to electron energies of hundreds of electronvolts.

Inductively­coupled plasmas (ICP) in the high electron density regime of the order of 10 13 cm −3 are generated and their electron density characteristics are investigated by the terahertz time­domain spectroscopy (THz­TDS) method. In this experiment, the plasma was producedCited by: 6.

Results of measurements of temperature and electron density distribution within an electrodeless discharge in argon at atmospheric pressure are briefly presented. The temperature is found to exhibit an off-axis peak of 9 ° by: Spatial distributions of the effective electron temperature (T eff) and plasma potential were studied from the measurement of an electron energy probability function in a side type ferrite-core inductively coupled plasma with an argon–helium the helium gas was diluted at the fixed total gas pressure of 5 mTorr in an argon discharge, the distribution of the plasma density Author: Duksun Han, Hyo-Chang Lee, Jin-Young Bang, Chin-Wook Chung, Se Youn Moon.

A tuned, cylindrical Langmuir probe has been used to measure the electron energy distribution function (EEDF) in atomic and molecular gases in an inductively coupled plasma. We have discussed the precautions necessary for making Langmuir probe measurements in fluorocarbon plasmas.

The ionic and neutral composition of the plasma is Cited by: The gas pressure at which the transition occurs increases with the discharge power. In contrast to the case of argon plasma, the gas temperature in the nitrogen discharge increases almost linearly with the discharge power.

The electron density in nitrogen plasma is about 10% of that in argon plasma. Finally, the electron density of low-pressure ICP was diagnosed both with this method and the Langmuir probe. The results revealed that the electron density increased with power and the peak value reached $\times 10^{17}\text{m}^{-3}$ at the radio frequency power of : Zhijie Song, Haojun Xu, Xiaolong Wei, Zenghui Chen.

Electron‐density and electron energy distribution functions (EEDFs) are measured in a 20‐cm‐diam by 14‐cm‐long cylindrical, inductively coupled plasma source driven by fields from a planar, spiral coil at MHz.

Radio‐frequency (rf) ‐filtered Langmuir probes are used to obtain spatial profiles of electron population characteristics in argon at powers and pressures of.

electron density has been measured successfully in the region of ×10 19 m −3 to ×10 20 m −3 and electron temperature in the region of eV to by: 6. Laser Thomson scattering in a novel, backscattered configuration was employed to measure the electron temperature (Te) and electron density (ne) in argon dc microdischarges, with an interelectrode.

Experimental measurements of the total energy lost per electron–ion pair lost, ε T, were performed in a low-pressure inductive atomic gases (Ar, He) and molecular gases (O 2, N 2) value of ε T was determined from a power balance based on the electropositive global (volume-averaged) model.

A floating harmonic method was employed to measure ion fluxes and electron Cited by: 7. on the electron number density and indicates that the electron density decreases with increase of gas flow rate and filling pressure, which may be explained as follows.

The mechanism of excitation and ionization of atomic and ionic species in argon plasma is supposed to occur mainly by electron Size: KB. Electron energy distribution functions (EEDFs) are measured in an argon inductively coupled plasma. It is observed that the measured EEDFs are nearly Maxwellian distributions, and the electron temperature derived from the EEDFs decreases with increasing input radio-frequency (rf) power.

It appears that additional ionization processes by: The characteristics of pulse modulated inductively coupled plasmas in argon and chlorine have been experimentally investigated.

Measurements were performed for peak rf powers between and W, duty cycles between 10 and 90%, pulse repetition frequencies between 3 and 20 kHz, and argon or chlorine gas. surface wavelength. (~ The electron density of an atmospheric-pressure discharge has been measured using Stark broadening.

(z) The objective of this paper is to summarize and compare measurements of spatially averaged electron densities (Ne) made in argon, microwave-generated ( GHz) surface wave discharges. In this regard, we have performed fully three dimensional (3D), time dependent measurements of the magnetic field, electron density, and electron temperature for an ICP sustained in argon in an industrial reactor designed for plasma etching in microelectronics : Jia Han, Patrick Pribyl, Walter Gekelman, Alex Paterson, Steven J.

Lanham, Chenhui Qu, Mark J. Kushn. A study of the dissociation of a small concentration of cyclic-C4F8(c-C4F8) in a predominately argon, low pressure inductively coupled plasma is reported. Measurements of electron density, plasma potential, and electron energy distribution function.The net electron density in the final system will be the sum of all the singly ionized species (ignoring double ionization for the analyte), thus we can write; - n^ + "^ + "^ (11) ^) (^) (^') where nur, "AT, and n^ are the total concentrations of argon (atom and ion), metal (atom and ion), and excited state argon by: Neutral Argon Plasma: Measurements of Electron Temperature and Density, and of Ion Acoustic Speeds Dean Henze, Janet Chao, Kent Lee, Patrick Smith University of San diego Department of Physics (Dated: Ap ) I.

INTRODUCTION Plasma is the most common phase of matter over the universe since stars are plasmas (they are scarce to usFile Size: 2MB.